S9683Si photodiode

Highly reliable photodiode for VUV detection

 

The S9683 is a Si photodiode specifically designed to detect VUV (vacuum ultraviolet) radiation with high reliability. This photodiode is hermetically sealed in a metal package with a quartz window. This is no outgassing from the inside of the package, eliminating the cause of decrease in VUV sensitivity.

 

Features
-Highly stable sensitivity and dark current against ArF excimer laser radiation (λ=193 nm)
-Hermetically sealed metal package with quartz window
-Large photosensitive area: 10 × 10 mm (1 inch metal package)

Photosensitive area

10 × 10 mm

Number of elements

1

Package

Metal

Cooling

Non-cooled

Reverse voltage (max.)

5 V

Spectral response range

193 to 1000 nm

Peak sensitivity wavelength (typ.)

760 nm

Photosensitivity (typ.)

0.06 A/W

Dark current (max.)

1000 pA

Rise time (typ.)

9 μs

Terminal capacitance (typ.)

4000 pF

Measurement condition

Ta=25 ℃, Typ., unless otherwise noted, 
Photosensitivity: λ=193 nm, Dark current: VR=10 mV, Terminal capacitance: VR=0 V, f=10 kHz, Rise time: VR=0 V

$99.00

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