Highly reliable photodiode for VUV detection
The S9682 is a Si photodiode specifically designed to detect VUV (vacuum ultraviolet) radiation with high reliability. This photodiode is hermetically sealed in a metal package with a quartz window. There is no outgassing from the inside of the package, eliminating the cause of decrease in VUV sensitivity.
Features
-Highly stable sensitivity and dark current against ArF excimer laser radiation (λ=193 nm)
-Hermetically sealed metal package with quartz window
-Large photosensitive area: 5.8 × 5.8 mm (TO-8 metal package)
Photosensitive area | 5.8 × 5.8 mm |
Number of elements | 1 |
Package | Metal |
Package category | TO-8 |
Cooling | Non-cooled |
Reverse voltage (max.) | 5 V |
Spectral response range | 193 to 1000 nm |
Peak sensitivity wavelength (typ.) | 760 nm |
Photosensitivity (typ.) | 0.06 A/W |
Dark current (max.) | 500 pA |
Rise time (typ.) | 2 μs |
Terminal capacitance (typ.) | 1000 pF |
Measurement condition | Ta=25 ℃, Typ., unless otherwise noted, |
Current Reviews: 0