Photodiode for VUV (Vacuum UV) detection
The S8552 is a VUV (Vacuum UV) photodiode suitable for detection of ArF excimer lasers (λ=193 nm). Designed to provide optimal performance in the VUV range, this photodiode offers more stable sensitivity even after long exposure to VUV radiation compared with conventional types.
Features-Reliable detection improves of ArF excimer laser (λ=193 nm)-Large photosensitive area: 10 × 10 mm-Windowless package: 16.5 × 15.0 mm ceramic package
Photosensitive area | 10 × 10 mm |
Number of elements | 1 |
Package | Ceramic |
Cooling | Non-cooled |
Reverse voltage (max.) | 5 V |
Photosensitivity (typ.) | 0.06 A/W |
Dark current (max.) | 1000 pA |
Rise time (typ.) | 9 μs |
Terminal capacitance (typ.) | 4000 pF |
Measurement condition | Typ. Ta=25 ℃, unless otherwise noted, Photosensitivity: λ=193 nm |
