S10359Si photodiode

Highly reliable, quadrant photodiode for ArF excimer laser monitor

 

S10359 is a Si photodiode with sensitivity extending into the VUV (vacuum ultraviolet) region and provides high reliability for VUV detection. S10359 is a variant (quadrant device) of the previously marketed S9683 photodiode. Its hermetically sealed package ensures excellent reliability and contains no resin materials so will not cause outgassing that may otherwise lower UV sensitivity.

 

Features
-High reliability against ArF excimer laser radiation (λ=193 nm)
-No UV sensitivity decrease by outgassing since no resin materials are used
  in the package
-Large active area: 10 × 10 mm/quadrant

Photosensitive area：10 × 10 mm
Number of elements：1
Package：Metal
Cooling：Non-cooled
Reverse voltage (max.)：20 V
Spectral response range：193 to 1000 nm
Peak sensitivity wavelength (typ.)：760 nm
Photosensitivity (typ.)：0.06 A/W
Dark current (max.)：500 pA
Rise time (typ.)：1 μs
Terminal capacitance (typ.)：500 pF
Measurement condition Ta=25 ℃, Typ., unless otherwise noted,  Photosensitivity: λ=193 nm, Dark current: VR=10 mV, Terminal capacitance: VR=0 V, f=10 kHz, Rise time: VR=0 V


$99.00

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