S10043Si photodiode

Highly reliable photodiode for VUV detection

The S10043 is a Si photodiode designed to detect high-power ArF excimer lasers (193 nm) with high accuracy and stability. By combining our newly developed technologies for forming ultra-thin PN junctions and high-reliability ultra-thin metal films, the S10043 shows almost no change in sensitivity even after exposure to ArF excimer laser beam of 1 kJ/cm².

Photosensitive area: 10 × 10 mm

Number of elements: 1

Package: Ceramic

Cooling: Non-cooled

Reverse voltage (max.): 5 V

Spectral response range: 190 to 1000 nm

Peak sensitivity wavelength (typ.): 720 nm

Photosensitivity (typ.): 0.015 A/W

Dark current (max.): 1000 pA

Rise time (typ.): 9 μs

Terminal capacitance (typ.): 4000 pF Measurement condition Ta=25 ℃, Photosensitivity: λ=193 nm